English(EN) Langdao Silex Shows an EUV Light Source Prototype, Says Mass Production Is Three to Five Years Away

Langdao Silex 发布EUV光源原型，量产需3-5年

作者 PulseAugur 编辑部 · [1 个来源] · 2026-10-15 07:45

总部位于上海的公司Langdao Silex发布了LPP极紫外（EUV）光源原型。虽然该原型展示了超过15W的低功率输出，但远未达到光刻量产所需的数百瓦功率。该公司估计，其EUV光源的量产仍需三到五年时间。 AI

影响 EUV光源技术的这一发展可能最终影响对AI硬件至关重要的先进半导体的制造。

排序理由该条目描述了一项新技术的原型发布，属于研发范畴。[lever_c_demoted from research: ic=1 ai=0.7]

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Newsworthiness bucket: Tool; 该条目描述了一项新技术的原型发布，属于研发范畴。[lever_c_demoted from research: ic=1 ai=0.7]
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Pandaily TIER_1 English(EN) · [email protected] (Pandaily) · 2026-10-15 07:45

Langdao Silex 展示EUV光源原型，称大规模生产尚需三到五年

Shanghai-based Langdao Silex displayed an LPP extreme ultraviolet light source prototype at CIIF 2026. Its low-power system delivers over 15W, far below the hundreds of watts lithography needs.