English(EN) Gigaphoton debuts neon recycling system with claimed 50% recovery rate

Gigaphoton 发布氖气回收系统，助力芯片制造商

作者 PulseAugur 编辑部 · [1 个来源] · 2026-10-06 13:20

日本半导体光刻设备制造商Gigaphoton开发了一套名为hTGM的新氖气回收系统。该系统已展示出50%的回收率，旨在提高效率并减少对乌克兰冲突造成的全球氖气供应链的依赖。Kanken Techno等其他公司也在开发类似技术，其中一些回收率超过90%，这表明半导体行业在氖气利用方面有巨大的改进潜力。 AI

影响提高了半导体制造的效率，这是AI硬件生产的关键推动因素。

排序理由该条目描述了一家非前沿AI实验室公司的最新产品，专注于提高半导体制造效率。

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报道来源 [1]

Tom's Hardware TIER_1 English(EN) · Jon Martindale · 2026-10-06 13:20

Gigaphoton 推出回收率号称达 50% 的氖气回收系统

New neon gas recycling systems promise to reduce the demand for the noble gas at major chip manufacturers using DUV lithography. But as that technology is supplanted, this much-needed fix may only be needed temporarily.

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Gigaphoton 推出回收率号称达 50% 的氖气回收系统

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