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English(EN) LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography

用于半导体光刻的新型物理信息世界模型

作者 PulseAugur 编辑部 · [1 个来源] ·

研究人员推出 LithoDreamer，一个新颖的物理信息世界模型框架，旨在解决半导体制造中计算光刻的复杂性。该框架将从掩模优化到光刻胶显影的整个光刻流程建模为一个多阶段演化系统。LithoDreamer 捕获状态之间的特征变化，并利用对比变分优化范式来指导模型生成与真实光刻物理学一致的演化，从而实现无需连续监督的可解释干预优化。实验证明了其在正向演化和逆向规划任务中的最先进性能。 AI

影响 这项研究通过提高计算光刻过程的准确性和效率，有望推动半导体制造业的发展。

排序理由 该集群包含一篇详细介绍特定科学领域新AI模型和框架的学术论文。[lever_c_demoted from research: ic=1 ai=1.0]

在 arXiv cs.AI 阅读 →

AI 生成摘要 · Google Gemini · 来自 1 个来源。 我们如何撰写摘要 →

用于半导体光刻的新型物理信息世界模型

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该集群包含一篇详细介绍特定科学领域新AI模型和框架的学术论文。[lever_c_demoted from research: ic=1 ai=1.0]
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报道来源 [1]

  1. arXiv cs.AI TIER_1 English(EN) · Yuqi Jiang, Yumeng Liu, Zimu Li, Jinyuan Deng, Qian Jin, Yucheng Cui, Yu Li, Xunzhao Yin, Qi Sun, Cheng Zhuo ·

    LithoDreamer：用于多阶段计算光刻的物理信息世界模型

    arXiv:2606.26713v1 Announce Type: new Abstract: As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving mask optimization, optical imaging, resist exposure,…

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