IEEE/JSAP Symposium on VLSI Technology and Circuits

Imec, ASML, TSMC achieve 50nm pitch for 2D transistors

Imec, ASML, and TSMC have successfully fabricated complementary 2D-material transistors on a 300mm wafer, achieving a 50nm pitch. This breakthrough integrates both n-type and p-type transistors with atomically thin 2D c…