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AI, Metrology, and ESG Intersect in Semiconductor Sustainability

By PulseAugur Editorial · [1 sources] ·

A new scoping review published on arXiv examines the intersection of Artificial Intelligence (AI), metrology, and Environmental, Social, and Governance (ESG) factors within the semiconductor industry. The paper analyzes 1,465 documents to identify a fragmented knowledge structure, highlighting a gap between AI-driven process optimization and sustainability governance. To address this, a 6-layer Safe and Sustainable by Design (SSbD) architecture is proposed, utilizing a System of Systems (SoS) paradigm to integrate virtual metrology, federated learning, and regulatory technology (RegTech) for secure, climate-neutral, and circular semiconductor value chains. AI

IMPACT Proposes a framework to integrate AI with sustainability goals in semiconductor manufacturing, potentially driving innovation in regulatory compliance and circular value chains.

RANK_REASON Academic paper published on arXiv detailing a scoping review and proposing a new architecture. [lever_c_demoted from research: ic=1 ai=1.0]

Read on arXiv cs.AI →

AI-generated summary · Google Gemini · from 1 sources. How we write summaries →

AI, Metrology, and ESG Intersect in Semiconductor Sustainability

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Academic paper published on arXiv detailing a scoping review and proposing a new architecture. [lever_c_demoted from research: ic=1 ai=1.0]
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COVERAGE [1]

  1. arXiv cs.AI TIER_1 English(EN) · Karen Ang, Han-Teng Liao ·

    Scoping Review of AI, Metrology, and ESG in the Semiconductor Sector: Implications for Safe and Sustainable by Design (SSbD)

    arXiv:2607.23082v1 Announce Type: cross Abstract: The semiconductor sector faces a dual transition: scaling manufacturing execution through Artificial Intelligence (AI) while satisfying stringent sustainability mandates, such as the EU Carbon Border Adjustment Mechanism (CBAM). T…

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