ENTITY Yuliangsheng

Yuliangsheng

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RESEARCH · CL_181885 · Aug 4 · 13:15

China's nascent lithography tools lag ASML, but domestic chip equipment share grows

China's domestic chipmaking tool industry is making strides, particularly in etch and deposition, where it now surpasses KLA. However, lithography remains a significant challenge, with nascent DUV machines from Shanghai…