ENTITY Twinscan NXT:1950i

Twinscan NXT:1950i

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SIGNIFICANT · CL_181885 · Aug 4 · 13:15

China advances domestic DUV lithography tool production, faces component import challenges

China is reportedly making progress in developing its own lithography machines, with plans to produce around five immersion DUV (deep ultraviolet) systems this year and 20 by 2027. These machines, developed by Shanghai …

China advances domestic DUV lithography tool production, faces component import challenges