ENTITY Tokyo Ohka Kogyo

Tokyo Ohka Kogyo

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SIGNIFICANT · CL_173177 · Jul 30 · 16:23

China names Shanghai Aishengna as maker of first domestic DUV chip scanner

Shanghai Aishengna has been identified as the manufacturer of China's first domestic immersion DUV lithography scanner. This development is significant as it represents a step towards domestic production of advanced chi…