ENTITY NXE:3100

NXE:3100

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TOOL · CL_304577 · Oct 16 · 16:30

China startup demos EUV light source prototype with domestic components

Chinese startup Langdao Silex has demonstrated a prototype extreme ultraviolet (EUV) light source, a critical component for advanced semiconductor manufacturing. The system boasts over 15W of output power and utilizes a…