ENTITY
LithoBench
LithoBench
PulseAugur coverage of LithoBench — every cluster mentioning LithoBench across labs, papers, and developer communities, ranked by signal.
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Papers · 30d
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1 day(s) with sentiment data
RECENT · PAGE 1/1 · 2 TOTAL
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New Physics-Informed Neural Operator Accelerates EUV Lithography Simulations
Researchers have developed a Physics-Informed Neural Operator (PINO) to improve the simulation of electromagnetic scattering problems in extreme ultraviolet (EUV) lithography. This PINO model, which factorizes into late…
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New LithoBench benchmark reveals large multimodal model limitations
Researchers have introduced LithoBench, a new benchmark designed to evaluate the capabilities of large multimodal models in interpreting geological lithology from remote sensing data. This benchmark includes 10,000 expe…