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ENTITY China Academy of Sciences

China Academy of Sciences

PulseAugur coverage of China Academy of Sciences — every cluster mentioning China Academy of Sciences across labs, papers, and developer communities, ranked by signal.

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  1. RESEARCH · CL_219588 ·

    China builds domestic EUV metrology ecosystem amid US restrictions

    China is developing its own ecosystem for extreme ultraviolet (EUV) metrology, crucial for advanced semiconductor manufacturing. This initiative involves domestic teams working on EUV light-source and measurement techno…