A new scoping review published on arXiv examines the intersection of Artificial Intelligence (AI), metrology, and Environmental, Social, and Governance (ESG) factors within the semiconductor industry. The paper analyzes 1,465 documents to identify a fragmented knowledge structure, highlighting a gap between AI-driven process optimization and sustainability governance. To address this, a 6-layer Safe and Sustainable by Design (SSbD) architecture is proposed, utilizing a System of Systems (SoS) paradigm to integrate virtual metrology, federated learning, and regulatory technology (RegTech) for secure, climate-neutral, and circular semiconductor value chains. AI
IMPACT Proposes a framework to integrate AI with sustainability goals in semiconductor manufacturing, potentially driving innovation in regulatory compliance and circular value chains.
RANK_REASON Academic paper published on arXiv detailing a scoping review and proposing a new architecture. [lever_c_demoted from research: ic=1 ai=1.0]
- Artificial Intelligence
- arXiv
- Han-Teng Liao
- Metrology
- Safe and Sustainable by Design
- Scopus
- System of Systems
- Web of Science
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