Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction
A new perspective paper proposes that generative AI models used in semiconductor manufacturing must be designed with physics principles integrated from the start, rather than relying on post-hoc filtering. The paper surveys existing architectural tools like physics-informed diffusion and PDE-constrained variational models, highlighting their application in areas such as lithography and process simulation. It argues that for physical systems where validity is paramount, generative models that enforce constraints by construction will outperform those that merely filter for them, with semiconductor fabrication serving as the most critical test case. AI
IMPACT This research could lead to more reliable AI-driven design and control in complex physical industries like semiconductor manufacturing.